Development of 3D Image Measurement System for Large Area
Author(s) : YEON TAEK OH
Abstract
The requirement of large-area and high-precision measurements has increased in industry area. The high-precision multi probe measurement system has been developed to measure the 3D shape. The three different multi probes are combined in measurement system. This system is synchronized between the probes to measure the same position in the sample. Also this paper shows the measurement results with multi probe measurement system
No fo Author(s) : 1
Page(s) : 272 - 275
Electronic ISSN : 2372-4153
Volume 2 :
Issue 2
Full Paper PDF
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