Modeling and Simulation of Inductively Coupled Plasma (ICP)
Author(s) : AMEL BELKEBIR , MOHAMMED SALAH AGGOUNE
Abstract
The purpose of this paper is to present a simplified model of inductively coupled plasma (ICP). The study of the effect of parameters such as current and number of turns in the coil is simulated using Comsol Multiphysics 3.5 by applying the fluid dynamic models that are generally appropriate for the investigation of inductively coupled plasmas
No fo Author(s) : 2
Page(s) : 169-173
Electronic ISSN : 2319 - 7498
Volume 7 :
Issue 1
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