Journals Proceedings

Abstract

This paper presents the design and finite element method (FEM) modeling of MEMS acoustic sensor optimized using the design rules of the commercially available Metal-Multi User MEMS Process (MetalMUMPs). The acoustic sensor is modeled with a structural layer of Nickel with 20 μm thickness. The acoustic sensor is designed for the detection of sound direction where the displacement amplitude of the sensor plates vary with the applied pressure and angle at specific sound frequency. Moreover, the stress induced in the sensor, corresponding to the input sound waves, is analyzed using FEM simulations and geometric modifications are made to have the stress in the sensor microstructure less than the yield stress of the Nickel. This allows to minimize the effect of mechanical fatigue on the proposed MEMS acoustic sensor performance.