CLASSIFICATION OF THIN FILM AND ULTRA THIN FILM DEPOSITION METODS
Author(s) : BOEV B., D.ANGELOVA, KARTUNOV S.
Abstract
Classification of thin film deposition methods-deposition of thin films of semiconductor materials plays a major role in many areas, especially research and development.
No fo Author(s) : 3
Page(s) : 60-61
Electronic ISSN : 2372-4153
Volume 5 :
Issue 1
Full Paper PDF
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