Journals Proceedings

Abstract

The objective of this work is to develop analytical solutions for analyzing a static behavior of a new micro-electromechanical (MEMS) resonator called Cross-Beam Resonator in terms of its geometry, material properties and the excitation voltage. Analytical equations have been developed for the determination of natural resonant frequency, electrostatic deflection of the beam and the shift in resonant frequency due to the bias voltage. Analytical equations are verified for their accuracy by simulating the resonator using Intellisuite. It is observed that the results of analytical solution compare well with those of Intellisuite simulation. However the correction factor has been determined by curve fitting to eliminate errors. In this work the concept of clamped-clamped beam resonator has been extended to cross-beam resonator. For the purpose of analysis cross beam is considered as a grid consisting of 4 members called arm. Using the theory of matrix analysis of framed structures we analyze the structure to find the mechanical stiffness and the deflection at the center.