Journals Proceedings

International Journal of Advances in Electronics Engineering

Modeling and structure parameters design of the silicon resonant Pressure sensor

Author(s) : MOHAMED .M. SHAGLOUF

Abstract

Based on the sensing mechanism of microsensor, a simulation model of a practical silicon beam resonator attached to an E-type round diaphragm and used for measuring pressure is established. The relationship between the basic natural frequency of the beam resonator and the pressure is calculated, analyzed and investigated. As a microsensor FEM is used to study some important simulation results on the vibration features of the beam resonators. Based on the differential output signals, a set of optimum parameters of the proposed sensing unit is determined.

No fo Author(s) : 1
Page(s) : 13 - 17
Electronic ISSN : 2278 - 215x
Volume 4 : Issue 3
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